MRS Proceedings · 1996 · 16 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsEtching ProcessesIii-v SemiconductorsIon ImplantationSemiconductor Device MaterialsWide-bandgap Semiconductor DevicesWide-bandgap SemiconductorsGallium NitrideGallium Nitride (Gan) MaterialsGallium Nitride Crystal GrowthIon Beam EtchingReactive Ion Etching
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