Reactive ION Beam Etching of GaN Grown By Movpe

K. Saotome, Akihiro Matsutani, Tomoe Shirasawa, Masami Mori, T. Honda, Takahiro Sakaguchi, Fumio Koyama, Kenichi Iga

MRS Proceedings · 1996 · 16 citations · 13 references

Concepts

References

13