Concepedia

Simulations of thin film deposition from atomic and cluster beams

George H. Gilmer, Christopher Roland, D. Stock, M. Jaraı́z, T. Dı́az de la Rubia

Materials Science and Engineering B · 1996 · 31 citations · 26 references

DOI

Concepts

References

26

Computer simulation of local order in condensed phases of silicon

Frank H. Stillinger, Thomas A. Weber · Physical review. B, Condensed matter · 1985 · 5.3K citations

, , +16

Nucleation and growth of thin films

J. A. Venables, G. D. T. Spiller, M. Hanbücken · Reports on Progress in Physics · 1984 · 2.9K citations

, , +17

Computer Simulation Using Particles

R. W. Hockney, J.W. Eastwood · 1988 · 2.1K citations

, , +12

Activation energy for surface diffusion of Si on Si(001): A scanning-tunneling-microscopy study

Y. W. Mo, Jonas Kleiner, M. B. Webb et al. · Physical Review Letters · 1991 · 728 citations

, , +17

Limiting thickness h_{epi} for epitaxial growth and room-temperature Si growth on Si(100)

D. J. Eaglesham, H.‐J. Gossmann, M. Cerullo · Physical Review Letters · 1990 · 325 citations

, , +17