Publication | Closed Access
Activation energy for surface diffusion of Si on Si(001): A scanning-tunneling-microscopy study
724
Citations
11
References
1991
Year
Materials ScienceActivation EnergyEngineeringTunneling MicroscopyPhysicsSurface Dimer RowsNanoelectronicsScanning-tunneling-microscopy StudySurface ScienceApplied PhysicsNumber DensitySiliceneSemiconductor MaterialSemiconductor Device FabricationSurface DiffusionSilicon On InsulatorMicroelectronics
The migration of Si on Si(001) has been investigated by analyzing the number density of islands formed during deposition using scanning tunneling microscopy. The activation energy and prefactor for diffusion in the fast direction, which is along the surface dimer rows, are found to be 0.67\ifmmode\pm\else\textpm\fi{}0.08 eV and \ensuremath{\sim}${10}^{\mathrm{\ensuremath{-}}3}$ ${\mathrm{cm}}^{2}$/sec, respectively.
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