Publication | Closed Access
Evaluation of thermal and growth stresses in heteroepitaxial AlN thin films formed on (0001) sapphire by pulsed laser ablation
12
Citations
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References
2002
Year
Materials ScienceAluminium NitrideEngineeringGrowth StressesApplied PhysicsLaser AblationLaser Processing TechnologyLaser-assisted DepositionThin FilmsPulsed Laser DepositionMicrostructure
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