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Self-aligned 3D shadow mask technique for patterning deeply recessed surfaces of micro-electro-mechanical systems devices

Shadow Mask TechniqueEngineeringMicrofabricationSurface ScienceApplied PhysicsMechanical EngineeringFabrication TechniquePattern TransferSelf-aligned 3DRecessed SurfacesElectronic PackagingMicroelectronicsSurface Processing3D PrintingNanolithography Method