Vacuum lithography using plasma polymerization and plasma development

A New Family of Positive Electron Beam Resists—Poly(Olefin Sulfones)

L. F. Thompson, M. J. Bowden · Journal of The Electrochemical Society · 1973 · 78 citations

Materials Science, Conducting Polymer, New Family +14

Electron irradiation of poly(olefin sulfones). Application to electron beam resists

M. J. Bowden, L. F. Thompson · Journal of Applied Polymer Science · 1973 · 78 citations

Engineering, Olefin Sulfones, Electron-beam Lithography +19

Plasma polymerized methyl-methacrylate as an electron-beam resist

Shinzo Morita, Junji Tamano, Shūzo Hattori et al. · Journal of Applied Physics · 1980 · 74 citations

Engineering, Electron-beam Lithography, Methyl-methacrylate Thin Film +16