Electron irradiation of poly(olefin sulfones). Application to electron beam resists

Abstract

Abstract All the poly(olefin sulfones) examined degraded rapidly under electron irradiation. The dose required to effect a molecular weight distribution completely separated from the original distribution as required for fractional solution development was similar for all polymers, viz., 1–2 × 10 −6 coulomb/cm 2 . This indicates that they all have similar values for G (scission). The film thickness of the exposed area decreased at a rate dependent on olefin structure and temperature. This process, termed vapor development, has been attributed to concurrent chain scission and depolymerization. Factors determining the rate of depropagation are discussed.