Concepedia

L. F. Thompson

LF

34

Publications

1.8K

Citations

23

H-Index

1972

Active since

Affiliations

AT&T (United States)(Current)

University of Minnesota

Missouri University of Science and Technology

Nokia (United States)

L. F. Thompson is an author at AT&T (United States) specializing in engineering, materials science, and polymer science.

Top concepts

EngineeringMaterial SciencePolymer SciencePolymer ChemistryChemistryApplied PhysicsPolymersPolymer CharacterizationPolymer ProcessingSmart Polymers

Publications per year

1972–2024

34

Publications

34

Introduction to microlithography

L. F. Thompson, C. Grant Willson, M. J. Bowden · CERN Document Server (European Organization for Nuclear Research) · 1994 · 513 citations

Materials Science, Lithographic Process, Engineering +13

Ion beam exposure characteristics of resists: Experimental results

Thomas M. Hall, Alfred Wagner, L. F. Thompson · Journal of Applied Physics · 1982 · 103 citations

Engineering, Chemistry, Conducting Polymer +18

The plasma polymerization of vinyl monomers. II. A detailed study of the plasma polymerization of styrene

L. F. Thompson, K. G. Mayhan · Journal of Applied Polymer Science · 1972 · 84 citations

Materials Science, Chemical Engineering, Engineering +15

A New Family of Positive Electron Beam Resists—Poly(Olefin Sulfones)

L. F. Thompson, M. J. Bowden · Journal of The Electrochemical Society · 1973 · 78 citations

Materials Science, Conducting Polymer, New Family +14

Electron irradiation of poly(olefin sulfones). Application to electron beam resists

M. J. Bowden, L. F. Thompson · Journal of Applied Polymer Science · 1973 · 78 citations

Engineering, Olefin Sulfones, Electron-beam Lithography +19

Rows per page

1–5 of 34