Introduction to microlithography - Concepedia

Concepedia

Publication | Closed Access

Introduction to microlithography

513

Citations

0

References

1994

Year

L. F. Thompson, C. Grant Willson, M. J. Bowden

CERN Document Server (European Organization for Nuclear Research)

Materials ScienceLithographic ProcessEngineeringElectron-beam LithographyBeam LithographyMicrofabricationMechanical EngineeringSurface ScienceApplied PhysicsPrinted ElectronicsFabrication TechniqueNanolithographyElectronic PackagingMicroelectronicsPlasma EtchingNanolithography Method

Abstract

An Introduction to Lithography The Lithographic Process: The Physics Organic Resist Materials Resist Processing Plasma Etching