CERN Document Server (European Organization for Nuclear Research) · 1994 · 514 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceMicrofabricationPlasma PhysicsSurface ScienceEtching ProcessesPlasma EtchingResist PatterningThin Film Resist Processing
An Introduction to Lithography The Lithographic Process: The Physics Organic Resist Materials Resist Processing Plasma Etching