Katsumi Yoneda

Vacuum ultraviolet absorption spectroscopy employing a microdiacharge hollow-cathode lamp for absolute density measurements of hydrogen atoms in reactive plasmas

Seigou Takashima, Masaru Hori, Toshio Goto et al. · Applied Physics Letters · 1999 · 131 citations

Ultraviolet Light, Engineering, Plasma Science +20

Development of vacuum ultraviolet absorption spectroscopy technique employing nitrogen molecule microdischarge hollow cathode lamp for absolute density measurements of nitrogen atoms in process plasmas

Seigou Takashima, Shigeo Arai, Masaru Hori et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 70 citations

Engineering, Glow Discharge, Absorption Spectroscopy +17

Absolute concentration and loss kinetics of hydrogen atom in methane and hydrogen plasmas

Seigou Takashima, Masaru Hori, Toshio Goto et al. · Journal of Applied Physics · 2001 · 66 citations

Engineering, Physics, Atomic Emission Spectroscopy +15

Behavior of hydrogen atoms in ultrahigh-frequency silane plasma

Seigou Takashima, Masaru Hori, Toshio Goto et al. · Journal of Applied Physics · 2001 · 38 citations

Ultrahigh-frequency Silane Plasma, Plasma Electronics, Engineering +15

Molecular modeling of low-k films of carbon-doped silicon oxides for theoretical investigations of the mechanical and dielectric properties

Nobuo Tajima, Takahisa Ohno, Tomoyuki Hamada et al. · Applied Physics Letters · 2006 · 34 citations

Engineering, Chemistry, Silicon On Insulator +20