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Microstructure and properties of aluminum contacts formed on GaAs(100) by low pressure chemical vapor deposition with dimethylethylamine alane source

Materials ScienceAluminium NitrideAluminum ContactsEngineeringSurface ScienceApplied PhysicsDimethylethylamine Alane SourceChemical DepositionMolecular Beam EpitaxyMicroelectronicsCompound SemiconductorChemical Vapor Deposition