Multi-layer microstructure fabrication by combining bulk silicon micromachining and UV-LIGA technology

Finite strain behavior of poly(ethylene terephthalate) (PET) and poly(ethylene terephthalate)-glycol (PETG)

Rebecca B. Dupaix, Mary C. Boyce · Polymer · 2005 · 236 citations

Natural Sciences, Materials Engineering, Materials Science +12

3D microfabrication by combining microstereolithography and thick resist UV lithography

Arnaud Bertsch, H. Lorenz, Philippe Renaud · Sensors and Actuators A Physical · 1999 · 174 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +11

Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots

Chien-Hung Ho, Kan-Ping Chin, Chii-Rong Yang et al. · Sensors and Actuators A Physical · 2002 · 75 citations

Engineering, Manufacturing Engineering, Biomaterials +7

A high-aspect-ratio comb actuator using UV-LIGA surface micromachining and (110) silicon bulk micromachining

Seong-Hyok Kim, Sang‐Hun Lee, Yong-Kweon Kim · Journal of Micromechanics and Microengineering · 2002 · 28 citations

Engineering, Manufacturing Engineering, Mechanical Engineering +17

Optimization and experimentation of nanoimprint lithography based on FIB fabricated stamp

Hongwen Sun, Jingquan Liu, Di Chen et al. · Microelectronic Engineering · 2005 · 27 citations

Engineering, Materials Engineering, Materials Science +12