Influence of N2/Ar-flow ratio on crystal quality and electrical properties of ScAlN thin film prepared by DC reactive magnetron sputtering

Ferroelectric thin films: Review of materials, properties, and applications

N. Setter, Dragan Damjanović, Lukas M. Eng et al. · Journal of Applied Physics · 2006 · 1.8K citations

Materials Science, Materials Engineering, Multiferroics +14

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

Morito Akiyama, Toshihiro Kamohara, Kazuhiko Kano et al. · Advanced Materials · 2008 · 994 citations

Materials Science, Materials Engineering, Alloy Thin Films +14

Influence of growth temperature and scandium concentration on piezoelectric response of scandium aluminum nitride alloy thin films

Morito Akiyama, Kazuhiko Kano, Akihiko Teshigahara · Applied Physics Letters · 2009 · 381 citations

Materials Science, Aluminium Nitride, Piezoelectric Response +11

Thickness dependence of the properties of highly<i>c</i>-axis textured AlN thin films

F. Martin, Paul Muralt, M.-A. Dubois et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 301 citations · Full text

Aluminium Nitride, Thin Film Physics, Engineering +16

Aluminum scandium nitride thin-film bulk acoustic resonators for wide band applications

Milena Moreira, Johan Bjurström, Ilia Katardjev et al. · Vacuum · 2011 · 266 citations

Materials Science, Aluminum Scandium, Aluminium Nitride +6