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ZnO thin films prepared by atomic layer deposition and rf sputtering as an active layer for thin film transistor

Materials ScienceElectrical EngineeringThin Film TransistorEngineeringNanoelectronicsOxide ElectronicsApplied PhysicsZno Thin FilmsThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionRf SputteringThin Film Processing