Concepedia

M Chen

MC

3

Publications

1.4K

Citations

3

H-Index

2000

Active since

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

Chinese Academy of Sciences

M Chen is an author at Shanghai Institute of Microsystem and Information Technology specializing in applied physics, engineering, and materials science.

ORCID

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Publications per year

2000–2004

3

Publications

3

X-ray photoelectron spectroscopy and auger electron spectroscopy studies of Al-doped ZnO films

M Chen, Xin Wang, Yang Yu et al. · Applied Surface Science · 2000 · 1.3K citations

, , +7

Intrinsic limit of electrical properties of transparent conductive oxide films

M Chen, Z.L. Pei, Xin Wang et al. · Journal of Physics D Applied Physics · 2000 · 107 citations

, , +15

Formation of total-dose-radiation hardened materials by sequential oxygen and nitrogen implantation and multi-step annealing

Wanbing Yi, En Xia Zhang, M Chen et al. · Semiconductor Science and Technology · 2004 · 23 citations

, , +22

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