Physical review. B, Condensed matter · 1999 · 42 citations · 8 references
Materials ScienceSemiconductorsEngineeringCrystalline DefectsDefect Density IncreasesApplied PhysicsAmorphous SiliconDegradation KineticsOptoelectronic DevicesIntegrated CircuitsMeasured Defect DensityAmorphous SolidDefect FormationDefect ToleranceLight-induced DegradationSilicon On Insulator
We have studied the degradation kinetics of undoped hydrogenated amorphous silicon $(a\ensuremath{-}\mathrm{S}\mathrm{i}:\mathrm{H})$ samples, in which a small fraction of microcrystallites is embedded. We find that the defect density increases with an unusually slow initial pace, which is then followed by the ``normal'' ${t}^{1/3}$ law and the subsequent saturation. The corresponding photoconductivity shows a remarkable initial stability. We present a model that reproduces the experimental results, and relates the structural and degradation anomalies. The measured defect density is interpreted as a superposition of contributions from a defective layer that wraps the microcrystallites and a high-quality amorphous matrix.
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