Publication | Closed Access
On light-induced effect in amorphous hydrogenated silicon
132
Citations
12
References
1981
Year
Materials EngineeringMaterials ScienceEngineeringOptical PropertiesSilicon On InsulatorSurface ScienceApplied PhysicsSiliceneProlonged Light ExposureChemistryThin FilmsAmorphous SolidMicroelectronicsOptoelectronicsThin Film ProcessingLight-induced EffectAmorphous Silicon Films
Amorphous silicon films prepared by a discharge of 10% SiH4-90% H2 mixture are shown to have properties comparable to those prepared from 100% SiH4. These films are found to be quite stable against prolonged light exposure.
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