Publication | Closed Access
A Moiré method for high accuracy alignment in nanoimprint lithography
42
Citations
7
References
2007
Year
Materials ScienceEngineeringElectron-beam LithographyBeam LithographyNanomaterialsMicrofabricationMicroscopyNanotechnologyApplied PhysicsPattern TransferNanolithographyNanofabricationNanometrologyNanolithography MethodMedicineBiophysics3D PrintingMoiré Method
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