A Moiré method for high accuracy alignment in nanoimprint lithography

A three-dimensional photonic crystal operating at infrared wavelengths

Shawn-Yu Lin, J. G. Fleming, Dale L. Hetherington et al. · Nature · 1998 · 1.1K citations

Natural Sciences, Materials Engineering, Materials Science +14

All-metallic three-dimensional photonic crystals with a large infrared bandgap

J. G. Fleming, Shawn-Yu Lin, Ihab El-Kady et al. · Nature · 2002 · 629 citations

Natural Sciences, Materials Science, Physics +13

Imprint lithography with sub-10 nm feature size and high throughput

Stephen Y. Chou, Peter R. Krauss · Microelectronic Engineering · 1997 · 373 citations

Engineering, Materials Engineering, Materials Science +13

Sub-20-nm Alignment in Nanoimprint Lithography Using Moiré Fringe

Wei Wu, Stephen Y. Chou · Nano Letters · 2006 · 123 citations

Engineering, Manufacturing Engineering, Materials Science +13

Multilevel nanoimprint lithography with submicron alignment over 4 in. Si wafers

Wei Zhang, Stephen Y. Chou · Applied Physics Letters · 2001 · 81 citations

Engineering, Manufacturing Engineering, Materials Science +14