Marko Vogler

Development of a novel, low-viscosity UV-curable polymer system for UV-nanoimprint lithography

Marko Vogler, Sabine Wiedenberg, M. Mühlberger et al. · Microelectronic Engineering · 2007 · 85 citations

Materials Science, Engineering, Polymer Technology +7

Single digit nanofabrication by step-and-repeat nanoimprint lithography

Christophe Péroz, Scott Dhuey, M Cornet et al. · Nanotechnology · 2011 · 46 citations

Materials Science, Single Digit Nanofabrication, Engineering +15

A Moiré method for high accuracy alignment in nanoimprint lithography

M. Mühlberger, Iris Bergmair, Wolfgang Schwinger et al. · Microelectronic Engineering · 2007 · 42 citations

Materials Science, Engineering, Electron-beam Lithography +15

Selective profile transformation of electron-beam exposed multilevel resist structures based on a molecular weight dependent thermal reflow

Arne Schleunitz, Vitaliy A. Guzenko, Andreas Schander et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 34 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +20

Combining nanoimprint lithography and a molecular weight selective thermal reflow for the generation of mixed 3D structures

Arne Schleunitz, Christian Spreu, Marko Vogler et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 28 citations

Engineering, Electron-beam Lithography, Mixed 3D +21