Concepedia

Arne Schleunitz

AS

14

Publications

451

Citations

12

H-Index

2005

Active since

Affiliations

Paul Scherrer Institute(Current)

Micro Resist Technology (Germany)

VTT Technical Research Centre of Finland

Arne Schleunitz is an author at Paul Scherrer Institute specializing in materials science, engineering, and microfabrication.

Top concepts

Publications per year

2005–2018

14

Publications

14

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Arne Schleunitz, Helmut Schift · Journal of Micromechanics and Microengineering · 2010 · 95 citations

, , +21

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Arne Schleunitz, Vitaliy A. Guzenko, Martin Messerschmidt et al. · Nano Convergence · 2014 · 63 citations · Full text

Shape control of polymer reflow structures fabricated by nanoimprint lithography

Helmut Schift, Christian Spreu, Arne Schleunitz et al. · Microelectronic Engineering · 2010 · 35 citations

, , +12

Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing

Arne Schleunitz, Helmut Schift · Microelectronic Engineering · 2010 · 35 citations

, , +11

Selective profile transformation of electron-beam exposed multilevel resist structures based on a molecular weight dependent thermal reflow

Arne Schleunitz, Vitaliy A. Guzenko, Andreas Schander et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 34 citations

, , +20

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