Arne Schleunitz

Fabrication of 3D nanoimprint stamps with continuous reliefs using dose-modulated electron beam lithography and thermal reflow

Arne Schleunitz, Helmut Schift · Journal of Micromechanics and Microengineering · 2010 · 95 citations

Engineering, Materials Engineering, Materials Science +10

Novel 3D micro- and nanofabrication method using thermally activated selective topography equilibration (TASTE) of polymers

Arne Schleunitz, Vitaliy A. Guzenko, Martin Messerschmidt et al. · Nano Convergence · 2014 · 64 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Shape control of polymer reflow structures fabricated by nanoimprint lithography

Helmut Schift, Christian Spreu, Arne Schleunitz et al. · Microelectronic Engineering · 2010 · 35 citations

Engineering, Materials Engineering, Materials Science +12

Fabrication of 3D patterns with vertical and sloped sidewalls by grayscale electron-beam lithography and thermal annealing

Arne Schleunitz, Helmut Schift · Microelectronic Engineering · 2010 · 35 citations

Engineering, Materials Engineering, Materials Science +10

Selective profile transformation of electron-beam exposed multilevel resist structures based on a molecular weight dependent thermal reflow

Arne Schleunitz, Vitaliy A. Guzenko, Andreas Schander et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 34 citations

Engineering, Materials Engineering, Materials Science +16