Fabrication and testing of a magnetically actuated micropump

The Fluid Mechanics of Microdevices—The Freeman Scholar Lecture

Mohamed Gad‐el‐Hak · Journal of Fluids Engineering · 1999 · 1.3K citations

Engineering, Manufacturing Engineering, Mechanical Engineering +16

A piezoelectric micropump based on micromachining of silicon

H.T.G. van Lintel, F.C.M. van de Pol, S. Bouwstra · Sensors and Actuators · 1988 · 617 citations · Full text

Engineering, Materials Engineering, Mechanical Engineering +12

Microflow devices and systems

S. Shoji, Masayoshi Esashi · Journal of Micromechanics and Microengineering · 1994 · 496 citations

Engineering, Chemical Engineering, Mechanical Engineering +17

Thin-film shape-memory alloy actuated micropumps

William L. Benard, H. Kahn, A. H. Heuer et al. · Journal of Microelectromechanical Systems · 1998 · 375 citations

Engineering, Materials Science, Mechanical Engineering +17

Chip-based microsystems for genomic and proteomic analysis

Giles H.W. Sanders, A. Manz · TrAC Trends in Analytical Chemistry · 2000 · 363 citations

Life Sciences, Bioengineering, Biomedical Engineering +14