Publication | Closed Access
Defect-selective etching of GaN in a modified molten bases system
99
Citations
7
References
2002
Year
Materials ScienceMaterials EngineeringElectrical EngineeringWide-bandgap SemiconductorEngineeringApplied PhysicsAluminum Gallium NitrideDefect-selective EtchingGan Power DeviceCategoryiii-v SemiconductorPlasma Etching
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