Thin Solid Films · 2006 · 35 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistrySurface ScienceThin FilmsAtomic Layer DepositionCoating ProcessesCoatingsThin-film DepositionThin-film MaterialsAtomic Layer Deposition PrecursorsDeposition TechniquesOxide Layer FormationPrecursor ChemistryPrecursor Design
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