Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor - Concepedia

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Atomic layer deposition of calcium oxide and calcium hafnium oxide films using calcium cyclopentadienyl precursor

35

Citations

30

References

2006

Year

Kaupo Kukli, Mikko Ritala, Timo Sajavaara, Timo S. Hänninen, Markku Leskelä

Thin Solid Films

Materials ScienceEngineeringCalcium HafniumNanotechnologyCalcium OxideSurface ScienceChemistryChemical DepositionPulsed Laser DepositionChemical Vapor DepositionAtomic Layer DepositionThin Film Processing

References

	Year	Citations

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