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Origins of unintentional incorporation of gallium in AlInN layers during epitaxial growth, part I: Growth of AlInN on AlN and effects of prior coating

Materials ScienceMaterials EngineeringAluminium NitrideEpitaxial GrowthEngineeringCorrosionSurface ScienceApplied PhysicsPrior CoatingGallium OxideChemical DepositionMolecular Beam EpitaxyAlinn Layers