Concepedia

A microbeam line for medium-energy ion beams

M. Takai, T. Matsuo, A. Kinomura, S. Namba, K. Inoue, K. Ishibashi, Y. Kawata

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 13 citations · 6 references

DOI

Concepts

References

6

Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo, Nobuyuki Takakura, Norihiko Samoto et al. · Japanese Journal of Applied Physics · 1984 · 124 citations

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Microanalysis by Focused MeV Helium Ion Beam

Mikio Takai, Kouji Matsunaga, K. Inoue et al. · Japanese Journal of Applied Physics · 1987 · 34 citations

, , +11

Laser-induced thermochemical maskless-etching of III?V compound semiconductors in chloride gas atmosphere

M. Takai, J. Tsuchimoto, Jun Tokuda et al. · Applied Physics A · 1988 · 25 citations

, , +14

Focused MeV beam line for microanalysis at Osaka

M. Takai, A. Kinomura, K. Inoue et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 23 citations

, , +5

Microbeam line with 1.5 MeV helium ions and protons at Osaka

K. Inoue, M. Takai, K. Matsunaga et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 20 citations

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