Focused MeV beam line for microanalysis at Osaka

Ion Beam Assisted Deposition of Metal Organic Films Using Focused Ion Beams

Kenji Gamo, Nobuyuki Takakura, Norihiko Samoto et al. · Japanese Journal of Applied Physics · 1984 · 124 citations

Natural Sciences, Materials Engineering, Materials Science +11

The Heidelberg proton microprobe

H. Kneis, B. Martin, R. Nobiling et al. · Nuclear Instruments and Methods in Physics Research · 1982 · 42 citations

Natural Sciences, Nuclear Medicine, Physics +6

Real and parasitic aberrations of quadrupole probe-forming systems

G.W. Grime, F. Watt, Gd Blower et al. · Nuclear Instruments and Methods in Physics Research · 1982 · 39 citations

Natural Sciences, Electrical Engineering, Physics +8

Effects of Implantation Temperature on Lattice Location of Tellurium Implanted in Gallium Arsenide

Mikio Takai, Kenji Gamo, Kohzoh Masuda et al. · Japanese Journal of Applied Physics · 1973 · 35 citations

Engineering, Materials Engineering, Materials Science +17

Microanalysis by Focused MeV Helium Ion Beam

Mikio Takai, Kouji Matsunaga, K. Inoue et al. · Japanese Journal of Applied Physics · 1987 · 34 citations

Natural Sciences, Materials Science, Physics +11