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Laser-induced thermochemical maskless-etching of III?V compound semiconductors in chloride gas atmosphere

SemiconductorsEngineeringPhysicsOptical PropertiesNatural SciencesApplied PhysicsLaser-induced Thermochemical Maskless-etchingChemistryV Compound SemiconductorsPulsed Laser DepositionLaser-assisted DepositionPlasma EtchingOptoelectronicsChemical Vapor DepositionChloride Gas Atmosphere