S. Namba

Monte Carlo modeling of the photo and Auger electron production in X-ray lithography with synchrotron radiation

Kenji Murata, M. Kotera, Koichi Nagami et al. · IEEE Transactions on Electron Devices · 1985 · 29 citations

Monte Carlo Model, Optical Materials, Engineering +21

muprobe using focused 1.5 MeV helium ion and proton beams

A. Kinomura, M. Takai, K. Inoue et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1988 · 26 citations

Mev Helium Ion, Nuclear Physics, Ion Beam Instrumentation +2

High-speed data processing for three-dimensional analysis by micro-RBS

M. Takai, Yu Katayama, A. Kinomura et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1992 · 16 citations

Engineering, Data Science, Natural Sciences +7

Effects of ion-implanted atoms upon conduction electron spin resonance (CESR) in a Si : P system

K. Murakami, K. Masuda, Kenji Gamo et al. · Applied Physics Letters · 1977 · 13 citations

Engineering, Spin-charge Conversion, Magnetic Resonance +22

A microbeam line for medium-energy ion beams

M. Takai, T. Matsuo, A. Kinomura et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1990 · 13 citations

Microbeam Line, Ion Beam, Applied Physics +1