M. Kotera

A simulation of keV electron scatterings in a charged-up specimen

M. Kotera, Hiroshi Suga · Journal of Applied Physics · 1988 · 56 citations

Electrical Engineering, Incident Primary Electrons, Kev Electron Scatterings +12

A Monte Carlo simulation of primary and secondary electron trajectories in a specimen

M. Kotera · Journal of Applied Physics · 1989 · 52 citations

Monte Carlo Model, Engineering, Nuclear Physics +19

Monte Carlo modeling of the photo and Auger electron production in X-ray lithography with synchrotron radiation

Kenji Murata, M. Kotera, Koichi Nagami et al. · IEEE Transactions on Electron Devices · 1985 · 29 citations

Monte Carlo Model, Optical Materials, Engineering +21

Dependence of linewidth and its edge roughness on electron beam exposure dose

M. Kotera, Kei Yagura, H. Niu · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 21 citations

Engineering, Electron-beam Lithography, Electron Diffraction +17

Three-dimensional simulation of resist pattern deformation by surface tension at the drying process

M. Kotera, Natsuha Ochiai · Microelectronic Engineering · 2005 · 18 citations

Materials Science, Drying Process, Engineering +13