A simulation of keV electron scatterings in a charged-up specimen

Abstract

Supposing that an insulator is charged-up negatively by an accumulation of incident primary electrons, we study how much the subsequent incident electron is influenced by the charge in the specimen. We introduce a new Monte Carlo simulation model of electron scattering in a solid taking into account an electric field around the simulated electron. In a present study the incident electron energy is 20 keV, and the insulator is a poly-methyl-methacrylate wafer of 1 mm in thickness. This paper clarifies the changes in some physical quantities, e.g., the backscattering coefficient, energy deposition, etc. due to the specimen charging during an electron beam irradiation.