Koichi Nagami

Monte Carlo simulation of 1–10-KeV electron scattering in a gold target

Masatoshi Kotera, Kenji Murata, Koichi Nagami · Journal of Applied Physics · 1981 · 78 citations

Electron Scattering, Engineering, Electron Diffraction +18

Monte Carlo simulation of 1–10-keV electron scattering in an aluminum target

Masatoshi Kotera, Kenji Murata, Koichi Nagami · Journal of Applied Physics · 1981 · 32 citations

Engineering, Electron Diffraction, Rao Sahib-wittry Equation +19

Quantitative electron microprobe analysis of thin films on substrates with a new Monte Carlo simulation

Kenji Murata, Masatoshi Kotera, Koichi Nagami · Journal of Applied Physics · 1983 · 29 citations

Materials Science, Simulation Model, Elastic Scattering +15

Monte Carlo modeling of the photo and Auger electron production in X-ray lithography with synchrotron radiation

Kenji Murata, M. Kotera, Koichi Nagami et al. · IEEE Transactions on Electron Devices · 1985 · 29 citations

Monte Carlo Model, Optical Materials, Engineering +21

Studies of energy dissipation in resist films by a Monte Carlo simulation based on the Mott cross section

Kenji Murata, Hiroaki Kawata, Koichi Nagami et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1987 · 25 citations

Engineering, Mott Cross Section, Energy Dissipation +16