Concepedia

Publication | Closed Access

Compatibility of silicon gates with hafnium-based gate dielectrics

DOI

24

Citations

10

References

2003

Year

D. C. Gilmer, R. I. Hegde, R. Cotton, James A. Smith, L. Dip, R. Garcia, V. Dhandapani, Dina H. Triyoso, D. Roan, Alexander Franke,
Microelectronic Engineering

References

YearCitations

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