Fabrication of low-cost mold and nanoimprint lithography using polystyrene nanosphere

Imprint of sub-25 nm vias and trenches in polymers

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Applied Physics Letters · 1995 · 2.7K citations

Engineering, Manufacturing Engineering, Materials Science +15

Nanoimprint lithography

Stephen Y. Chou, Peter R. Krauss, Preston J. Renstrom · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 1.7K citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces

John C. Hulteen, Richard P. Van Duyne · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 1.4K citations

Natural Sciences, Materials Engineering, Materials Science +14

Specimen size effect on tensile strength of surface-micromachined polycrystalline silicon thin films

Toshiyuki Tsuchiya, Osamu Tabata, Jiro Sakata et al. · Journal of Microelectromechanical Systems · 1998 · 389 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fabrication of nanopillars by nanosphere lithography

Chin Li Cheung, Rebecca J. Nikolić, C. E. Reinhardt et al. · Nanotechnology · 2006 · 304 citations

Engineering, Materials Engineering, Materials Science +17