Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beams

ENERGY DEPENDENCE OF ION-INDUCED SPUTTERING YIELDS FROM MONATOMIC SOLIDS AT NORMAL INCIDENCE

Yasunori Yamamura, H. Tawara · Atomic Data and Nuclear Data Tables · 1996 · 745 citations

Natural Sciences, Materials Science, Physics +4

Plasma display panels: physics, recent developments and key issues

Journal of Physics D Applied Physics · 2003 · 571 citations

Natural Sciences, Electrical Engineering, Physics +17

Low-energy xenon ion sputtering of ceramics investigated for stationary plasma thrusters

Yoann Garnier, Virginie Viel, Jean‐François Roussel et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 121 citations

Natural Sciences, Materials Science, Physics +15

Etching yield of SiO2 irradiated by F+, CFx+ (x=1,2,3) ion with energies from 250 to 2000 eV

Kazuhiro Karahashi, Ken-ichi Yanai, Kenji Ishikawa et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2004 · 81 citations

Natural Sciences, Materials Engineering, Materials Science +17

Fragment Ions of Dimethylsilane Produced by Hot Tungsten Wires

Satoru Yoshimura, Akinori Toh, Satoshi Sugimoto et al. · Japanese Journal of Applied Physics · 2006 · 38 citations

Natural Sciences, Chemistry, Materials Science +7