Kazumasa Ikuse

Experimental evaluation of MgO sputtering yields by monochromatic Ne, Kr, or Xe ion beams

Kiyohiro Hine, Satoru Yoshimura, Kazumasa Ikuse et al. · Thin Solid Films · 2008 · 37 citations

Materials Engineering, Materials Science, Ion Implantation +11

Science-based, data-driven developments in plasma processing for material synthesis and device-integration technologies

Makoto Kambara, Satoru Kawaguchi, Hae June Lee et al. · Japanese Journal of Applied Physics · 2022 · 37 citations · Full text

Artificial Intelligence, Engineering, Machine Learning +16

Characterization of descriptors in machine learning for data-based sputtering yield prediction

Hiori Kino, Kazumasa Ikuse, Hieu‐Chi Dam et al. · Physics of Plasmas · 2021 · 33 citations · Full text

Regression Models, Engineering, Machine Learning +14

Measurement of Magnesium Oxide Sputtering Yields by He and Ar Ions with a Low-Energy Mass-Selected Ion Beam System

Kiyohiro Hine, Satoru Yoshimura, Kazumasa Ikuse et al. · Japanese Journal of Applied Physics · 2007 · 32 citations

Materials Science, Ion Implantation, Engineering +12

Sputtering yields of Au by low-energy noble gas ion bombardment

Kazumasa Ikuse, Satoru Yoshimura, Kiyohiro Hine et al. · Journal of Physics D Applied Physics · 2009 · 28 citations

Noble Gas, Ion Implantation, Engineering +10