Publication | Open Access

Comparative study between conventional macroscopic IV techniques and advanced AFM based methods for electrical characterization of dielectrics at the nanoscale

Materials ScienceElectrical EngineeringDielectricsEngineeringMicrofabricationNanomaterialsNanotechnologyMicroscopyApplied PhysicsElectrical CharacterizationNano Electro Mechanical SystemScanning Probe MicroscopyNanometrologyNanoscale ScienceMicroelectronicsElectrical PropertyComparative StudyElectrical Insulation