Interface sulfur passivation using H 2 S annealing for atomic-layer-deposited Al 2 O 3 films on an ultrathin-body In 0.53 Ga 0.47 As-on-insulator

Hyun Soo Jin, Young Jin Cho, Sangmoon Lee, Dae Hyun Kim, Dae Woong Kim, Dongsoo Lee, Jong-Bong Park, Jeong Yeon Won, Myoung‐Jae Lee, Seong‐Ho Cho,

Applied Surface Science · 2014 · 16 citations · 30 references

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