Applied Surface Science · 2014 · 16 citations · 30 references
Natural SciencesMaterials EngineeringMaterials ScienceInterface ScienceSurface ScienceThin FilmsAluminum OxidesAtomic Layer DepositionInterface EngineeringSemiconductor SurfacesSurface PassivationThin Film AnnealingAnnealing Temperature EffectsAtomic Layer Deposition InterfacesAtomic Layer Deposition PassivationInterface PassivationSulfur Passivation
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