Cross-Sectional TEM Specimen Preparation of Semiconductor Devices by Focused Ion Beam Etching

The preparation of cross‐section specimens for transmission electron microscopy

J. C. Bravman, Robert Sinclair · Journal of Electron Microscopy Technique · 1984 · 524 citations

Natural Sciences, Materials Science, Physics +11

Cross-sectional specimens for transmission electron microscopy

M. S. Abrahams, C. J. Buiocchi · Journal of Applied Physics · 1974 · 119 citations

Engineering, Materials Engineering, Materials Science +17

Advances in Transmission Electron Microscope Techniques Applied to Device Failure Analysis

T. T. Sheng, R. B. Marcus · Journal of The Electrochemical Society · 1980 · 81 citations

Engineering, Materials Engineering, Materials Science +13

A Grinding/Polishing Tool for TEM Sample Preparation

Stanley J. Klepeis, J. Benedict, Ron Anderson · MRS Proceedings · 1987 · 72 citations

Natural Sciences, Materials Engineering, Materials Science +7

Lithographic fabrication of transmission electron microscopy cross sections in III–V materials

E. A. Dobisz, H. G. Craighead, E. D. Beebe et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 10 citations

Engineering, Materials Engineering, Materials Science +16