Publication | Closed Access
In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry
19
Citations
43
References
2015
Year
Materials ScienceBoron NitrideEngineeringSurface ScienceApplied PhysicsC-bn FilmsChemistryThin FilmsFluorine ChemistryChemical Vapor DepositionThin Film Processing
| Year | Citations | |
|---|---|---|
1995 | 23.7K | |
1979 | 1K | |
2003 | 460 | |
1998 | 457 | |
1991 | 450 | |
1992 | 352 | |
1996 | 278 | |
1993 | 265 | |
1987 | 257 | |
2002 | 249 |
Page 1
Page 1