Concepedia

Publication | Closed Access

In situ photoelectron spectroscopic characterization of c-BN films deposited via plasma enhanced chemical vapor deposition employing fluorine chemistry

19

Citations

43

References

2015

Year

References

YearCitations

1995

23.7K

1979

1K

2003

460

1998

457

1991

450

1992

352

1996

278

1993

265

1987

257

2002

249

Page 1