Concepedia

Publication | Closed Access

Characterization of ALCVD-Al2O3 and ZrO2 layer using X-ray photoelectron spectroscopy

DOI

249

Citations

9

References

2002

Year

Hiroshi Nohira, Wei‐Bor Tsai, W.F.A. Besling, Edward Young, J. Pétry, Thierry Conard, Wilfried Vandervorst, Stefan De Gendt, Marc Heyns, Jan Willem Maes,
Journal of Non-Crystalline Solids

References

YearCitations

Page 1