Concepedia

Study on the accumulated impurities at the epilayer/substrate interface and their influence on the leakage current of metal-semiconductor-field effect transistors

Shigekazu Izumi, N. Yoshida, H. Takano, M. Otsubo

Journal of Crystal Growth · 1993 · 10 citations · 9 references

Concepts

EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsCarrier TransportField-effect TransistorsMetal-oxide-semiconductor Field-effect TransistorsMetal-semiconductor ContactsSemiconductor Device MaterialsSemiconductor InterfacesDoping Effects On Device PerformanceGate Oxide DegradationGate Oxide LeakageImpuritiesLeakage Current ReductionMetal-semiconductor Field-effect TransistorsSource-drain Leakage

References

9

Infrared Absorption at Longitudinal Optic Frequency in Cubic Crystal Films

Dwight W. Berreman · Physical Review · 1963 · 1K citations

Natural Sciences, Materials Science, Physics +17

Deep impurities in semiconductors

J. Llacer · Journal of Crystal Growth · 1974 · 785 citations

Engineering, Materials Science, Physics +12

Optical properties of thin films and the Berreman effect

B. Harbecke, B. Heinz · Applied Physics A · 1985 · 209 citations

Natural Sciences, Materials Science, Physics +16

Assessment of oxygen in gallium arsenide by infrared local vibrational mode spectroscopy

J. Schneider, B. Dischler, H. Seelewind et al. · Applied Physics Letters · 1989 · 109 citations

Natural Sciences, Chemistry, Physics +17

Low-Temperature Surface Cleaning of GaAs by Electron Cyclotron Resonance (ECR) Plasma

Naoto Kondo, Yasushi Nanishi · Japanese Journal of Applied Physics · 1989 · 64 citations

Natural Sciences, Materials Science, Physics +17