M. Otsubo

Preferential Etching of GaAs Through Photoresist Masks

M. Otsubo, Takao Oda, H. Kumabe et al. · Journal of The Electrochemical Society · 1976 · 57 citations

Electrical Engineering, Chemical Engineering, Engineering +13

Liquid phase epitaxial growth of GaAs from AuGeNi melts

M. Otsubo, H. Kumabe, H. Miki · Solid-State Electronics · 1977 · 45 citations

Applied Physics, Molecular Beam Epitaxy, Epitaxial Growth +2

Photo/EB hybrid exposure process for T-shaped gate superlow-noise HEMTs

K. Hosogi, Nobumasa Nakano, H. Minami et al. · Electronics Letters · 1991 · 31 citations

High Performance Hemts, Electrical Engineering, Engineering +11

Radiation Annealing of Si- and S-Implanted GaAs

Kazuhiko Ito, Masahiro Yoshida, M. Otsubo et al. · Japanese Journal of Applied Physics · 1983 · 27 citations

Semiconductors, Materials Science, Electrical Engineering +11

Degradation of Gallium Arsenide Crystals by the Cold-Working Treatment (Abrasion)

M. Otsubo, Hidejiro Miki, K. Shirahata et al. · Japanese Journal of Applied Physics · 1975 · 27 citations

Materials Engineering, Materials Science, Chemical Engineering +15