Publication | Closed Access
Self-aligned Ge and SiGe three-dimensional epitaxy on dense Si pillar arrays
46
Citations
70
References
2013
Year
EngineeringPhysicsSelf-aligned GeApplied PhysicsSemiconductor Device FabricationMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthOptoelectronicsSige Three-dimensional Epitaxy
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