An in situ scanning-slit alignment system for Kirkpatrick–Baez optics

Formation of Optical Images by X-Rays

Paul Kirkpatrick, Albert V. Baez · Journal of the Optical Society of America · 1948 · 1.2K citations

Natural Sciences, Physics, Biomedical Optics +15

Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performance

J. H. Underwood, Troy W. Barbee · Applied Optics · 1981 · 366 citations

Natural Sciences, Materials Engineering, Materials Science +15

Extreme ultraviolet lithography

R. H. Stulen, Donald W. Sweeney · IEEE Journal of Quantum Electronics · 1999 · 193 citations

Engineering, Electrical Engineering, Manufacturing Engineering +13

Phase-shifting point diffraction interferometer

H. Medecki, Edita Tejnil, Kenneth A. Goldberg et al. · Optics Letters · 1996 · 147 citations

Natural Sciences, Physics, Optical Materials +16

<title>Incoherent x-ray mirror surface metrology</title>

O. Hignette, Andreas K. Freund, Elia Chinchio · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 75 citations

Engineering, Physics, Metrology +15