Edita Tejnil

Phase-shifting point diffraction interferometer

H. Medecki, Edita Tejnil, Kenneth A. Goldberg et al. · Optics Letters · 1996 · 147 citations

Natural Sciences, Physics, Optical Materials +16

Tunable coherent radiation in the soft X-ray and extreme ultraviolet spectral regions

David Attwood, Patrick Naulleau, Kenneth A. Goldberg et al. · IEEE Journal of Quantum Electronics · 1999 · 52 citations

Natural Sciences, Physics, Optics +12

At-wavelength interferometry for extreme ultraviolet lithography

Edita Tejnil, Kenneth A. Goldberg, Sang-Hun Lee et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 39 citations

Natural Sciences, Materials Science, Optical Materials +16

Characterization of an EUV Schwarzschild objective using phase-shifting point diffraction interferometry

Kenneth A. Goldberg, Edita Tejnil, Sang Hun Lee et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1997 · 24 citations

Natural Sciences, Physics, Optical Materials +16

EUVL defect printability at the 32-nm node

Eric M. Gullikson, Edita Tejnil, Ted Liang et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +16