Concepedia

Phil Batson

PB

Statistics

Publications

5

Citations

137

H-Index

5

Active since

1990

Affiliations

Lawrence Berkeley National Laboratory(Current)

Phil Batson is an author at Lawrence Berkeley National Laboratory specializing in engineering, applied physics, and physics.

Top concepts

Publications per year

1990–2005

5

Publications

5

Fourier-synthesis custom-coherence illuminator for extreme ultraviolet microfield lithography

Patrick Naulleau, Kenneth A. Goldberg, Phil Batson et al. · Applied Optics · 2003 · 45 citations

, , +13

High-resolution soft X-ray emission spectrograph at advanced light source

Yi‐De Chuang, John Pepper, Wayne R. McKinney et al. · Journal of Physics and Chemistry of Solids · 2005 · 38 citations

, , +4

The scanning transmission microscope at the NSLS

H. Rarback, Christopher Buckley, Kaarin K. Goncz et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 1990 · 25 citations

, , +7

At-wavelength detection of extreme ultraviolet lithography mask blank defects

Seongtae Jeong, Mourad Idir, Yun Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 18 citations

, , +14

An in situ scanning-slit alignment system for Kirkpatrick–Baez optics

Patrick Naulleau, Phil Batson, Paul Denham et al. · Optics Communications · 2002 · 11 citations

, , +9

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