Yun Lin

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Active since

1997

Affiliations

University of California, Berkeley(Current)

Yun Lin is an author at University of California, Berkeley specializing in mask inspection, extreme ultraviolet lithography, and computational engineering.

Publications per year

1997–1998

Publications

Minimum critical defects in extreme-ultraviolet lithography masks

Yun Lin, Jeffrey Bokor · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 20 citations

Natural Sciences, Computational Engineering, Condition Assessment +13

At-wavelength detection of extreme ultraviolet lithography mask blank defects

Seongtae Jeong, Mourad Idir, Yun Lin et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1998 · 18 citations

Engineering, Electrical Engineering, Optics +11

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