Thin Solid Films · 2011 · 88 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyDefects In Electronic MaterialsDopingOxide SemiconductorsSurface PassivationThin Film AnnealingAnnealing EffectsAnnealing Temperature EffectsAnnealing Time Effects
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