Chemical Vapor Deposition and Atomic Layer Deposition of Coatings for Mechanical Applications

Surface chemistry of atomic layer deposition: A case study for the trimethylaluminum/water process

Riikka L. Puurunen · Journal of Applied Physics · 2005 · 2.5K citations

Materials Science, Surface Technology, Chemical Engineering +14

Chemical vapour deposition of coatings

Kwang‐Leong Choy · Progress in Materials Science · 2003 · 1.6K citations

Materials Science, Chemical Engineering, Engineering +6

Surface Chemistry for Atomic Layer Growth

Steven M. George, A. W. Ott, J. W. Klaus · The Journal of Physical Chemistry · 1996 · 669 citations

Materials Science, Engineering, Surface Chemistry +12

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Jeffrey W. Elam, Markus D. Groner, Steven M. George · Review of Scientific Instruments · 2002 · 550 citations

Aluminium Nitride, Engineering, Al2o3 Ald +16

Preparation and Properties of Thin Film Boron Nitride

Myron J. Rand, James F. Roberts · Journal of The Electrochemical Society · 1968 · 253 citations

Materials Science, Semiconductors, Boron Nitride +10