Publication | Closed Access
Optical characterization of HfO2 thin films grown by atomic layer deposition
191
Citations
35
References
2004
Year
Materials ScienceEpitaxial GrowthOptical MaterialsEngineeringOptical PropertiesSurface ScienceApplied PhysicsChemical Vapor DepositionThin FilmsOptical CharacterizationMolecular Beam EpitaxyOptoelectronicsHfo2 Thin FilmsAtomic Layer DepositionThin Film Processing
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